Thewater vapor oxidation is take the high pure water steam as theoxidizing atmosphere, responds the production silicon dioxide by thesilicon chip surface silicon atom and the hydrone.
水汽氧化是以高纯水蒸汽为氧化气
，
片表面的原子和水
子反
生成二氧化。
Thewater vapor oxidation is take the high pure water steam as theoxidizing atmosphere, responds the production silicon dioxide by thesilicon chip surface silicon atom and the hydrone.
水汽氧化是以高纯水蒸汽为氧化气，片表面的原子和水子反生成二氧化。
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