Thewater vapor oxidation is take the high pure water steam as theoxidizing atmosphere, responds the production silicon dioxide by thesilicon chip surface silicon atom and the hydrone.
汽氧化是以高纯
蒸汽为氧化气氛,由硅片表面的硅原子和
分子反
生成二氧化硅。
Thewater vapor oxidation is take the high pure water steam as theoxidizing atmosphere, responds the production silicon dioxide by thesilicon chip surface silicon atom and the hydrone.
汽氧化是以高纯
蒸汽为氧化气氛,由硅片表面的硅原子和
分子反
生成二氧化硅。
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