1.High processing accuracy due to superprecision linear motion pair adopted in moving parts.

1.运部分采用高精度直线轴承运,角精度高。

2.The features and applications in superprecision turnings of piezoelectric ceramic inching motion devices are introduced.

2.绍了压电机构的性能特点及在超精密车削加工中的多种用途。